发明名称 ALIGNMENT DEVICE AND METHOD FOR DEPOSITING ORGANIC MATERIAL
摘要 PURPOSE: An alignment device is provided to precisely position a deposition mask on a substrate by facilitating deposition of an organic material on to the substrate which will be a part of an organic light emitting device. CONSTITUTION: A base(14) has the first set of alignment pins(16) and the second set of alignment pins(18,18a,18b). A plate(20) is secured to the base. A frame(22) has an opening aligned with the plate. The frame is formed with the first set of alignment pin receiving holes corresponding to the position of the first set of pins so that the frame is removably mounted to the base. The deposition mask(12) is positioned on the plate. A transparent flat plate(28) contacts the second set of pins and the deposition mask and is sized to expose portions of the deposition mask. A securing unit secures the exposed portions of the deposition mask to the frame.
申请公布号 KR20030004073(A) 申请公布日期 2003.01.14
申请号 KR20020036087 申请日期 2002.06.26
申请人 EASTMAN KODAK COMPANY 发明人 CLARK THOMAS KENYON
分类号 H05B33/10;C23C14/04;C23C14/24;H01L33/00;H01L51/40;H01L51/50;H01L51/56;(IPC1-7):H01L33/00 主分类号 H05B33/10
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