Magnetic field probe having a shielding layer to protect lead wires with an isolating layer

摘要

A magnetic field probe includes a substrate and a conductive layer provided on the substrate. The conductive layer has a coil, lead wires, and pads. The coil has at least one turn and outputs a signal indicative of a magnetic field from a device under test in a vicinity of the magnetic field probe. The lead wires extend from the coil to the pads, the signal from the coil being transmitted to the pads through the lead wires. An isolating layer of a dielectric material is provided on the lead wires to protect the lead wires between the coil and the pads in the conductive layer. A shielding layer of a conductive material is provided on the isolating layer to protect the isolating layer. The shielding layer prevents distortion of the magnetic field at the lead wires in conjunction with the isolating layer.