| 摘要 |
A method and apparatus is provided for forming a light absorption film, composed of a porous metallic vapor deposited film with crystalline grown up in a dendrite structure, in a vacuum vapor deposition. A targeted time profile of applied electric power is obtained from electric current flowing through an evaporating boat 9 and a voltage potential thereof that enable a proper film quality to be realized with the evaporating boat using a resistive-heating technique and is preliminarily measured and stored in a computer 17 for controlling current electric power, obtained by electric current currently flowing through the evaporating boat and a voltage thereof currently appearing during a current vapor deposition process, so as to match the targeted time profile of the applied electric power. Under a condition where a desired light absorption film is obtained, since the amount of applied electric power correlated with fluctuations in an evaporating speed falls in a deviation range of approximately ±5%, a strong relationship exists between electric power applied to the evaporating boat and a quality of a resulting deposited film. Accordingly, accurately realizing an appropriately applied electric power that is preliminarily and experimentally obtained enables proper control of a vapor deposition speed, resulting in formation of a desired light absorption film in a stable and easy manner.
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