发明名称 Saw device
摘要 A SAW device includes a piezoelectric substrate, and an electrode having a first metal film which is formed over the piezoelectric substrate and is made with a first material, and second metal films which are formed over side walls of the first metal film and are made with a second material which is different from the first material.
申请公布号 US2002195675(A1) 申请公布日期 2002.12.26
申请号 US20020173944 申请日期 2002.06.19
申请人 HAKAMADA SHINICHI 发明人 HAKAMADA SHINICHI
分类号 H03H9/145;H03H3/08;H03H9/02;(IPC1-7):H01L29/82;H01L21/00 主分类号 H03H9/145
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