发明名称 Controlled conversion of metal oxyfluorides into superconducting oxides
摘要 An oxide superconductor article is provided having an oxide superconductor film having a thickness of greater than 0.5 microns disposed on a substrate, said article having a transport critical current density (Jc) of greater than or equal to about 105 A/cm2 at 77K, zero field. The oxide superconductor film is characterized by high Jc and high volume percent of c-axis epitaxial oxide grains, even with thicknesses of up to 1 micron. The oxide superconductor article is prepared by providing a metal oxyfluoride film, said metal oxyfluoride film comprising the constituent metallic elements of an oxide superconductor in substantially stoichiometric proportions; and converting the metal oxyfluoride into the oxide superconductor at a rate of conversion selected by adjusting a reaction parameter selected from the group consisting of temperature, PH2O, PO2, and time and combinations thereof, such that an oxide superconductor film having a transport critical current density of greater than or equal to about 105 A/cm5 at 77K, zero field is obtained.
申请公布号 NZ502030(A) 申请公布日期 2002.12.20
申请号 NZ19980502030 申请日期 1998.06.17
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 SMITH, JOHN A;CIMA, MICHAEL J;SONNENBERG, NEVILLE
分类号 C30B29/22;C23C14/06;C23C16/30;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):H01L39/24 主分类号 C30B29/22
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