| 摘要 |
<p>An exhaust gas treating method capable of treating exhaust gas containing PFC requiring high temperature in decomposing without by-producing CO, performing a complicated combustion control and being affected by variations in exhaust gas composition. Fuel gas introduced into a primary combustion area in a combustion furnace (2) and exhaust gas containing at least perfluorocarbon are burnt incompletely in the presence of combustion assisting gas to be introduced into the primary combustion area so as to turn combustion flame into reducing flame. Combustion gas produced in the primary combustion area is burnt, in the presence of combustion assisting gas to be introduced into a secondary combustion area, in the secondary combustion area located downstream the primary combustion area in the combustion gas flow in the combustion furnace (2) so as to oxidize carbon monoxide contained in the combustion gas. The combustion excess air ratio in the primary combustion area is set to be lower than a total combustion excess air ratio in the primary and secondary combustion areas.</p> |
