| 摘要 |
PURPOSE: A method for detecting defects in regular patterns is provided to rapidly determine irregular components by defining G-value for indicating regularity of diffraction fringes and measuring diffraction shape of an object. CONSTITUTION: A method comprises a first step(S11,S12,S13) of detecting, through an optical detector, distribution of light generated from a light source and passed through the grid structure where the width of grid and the space between grids are not constant; a second step(S14,S15,S16) of determining an optimum defect detection position by analyzing, through a diffraction wave analysis, the result of detection obtained in the first step, and setting a threshold value by measuring uniformity of diffraction patterns corresponding to the determined position; and a third step(S17,S18,S19) of judging defects of grid of an object by comparing the threshold value set in the second step with the light intensity value of a light detection unit for measurement of diffraction shape of the object.
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