| 摘要 |
PURPOSE: A vertical cavity surface emitting laser is provided to oscillate overpoweringly a single transverse mode by using a feedback member for feeding back a laser beam outputted to the outside of a resonator. CONSTITUTION: A substrate(100) is formed with a chemical semiconductor material. A lower DBR(Distributed Bragg Reflector)(110) and an upper DBR(140) are used for forming a resonator for inducing and amplifying a beam from an active layer(120). The lower DBR(110) is doped by the same type dopant as the substrate(100). The upper DBR(140) is doped by the opposite type dopant to the lower DBR(110). The upper DBR(140) and the lower DBR(110) are formed by laminating the chemical semiconductor materials of different refractive indexes. The refractive index of the lower DBR(110) is higher than the refractive index of the upper DBR(140). The upper DBR(140) and the lower DBR(110) are used for inducing the flow of electrons and positive holes by the current applied from an upper and a lower electrode(160,170). A current limit layer(130) is formed on the active layer(120).
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