| 摘要 |
On the test reticle are located modules (1), contg. cells (3) in which are fitted lines of given width and spacing in different orientation. Preferably on both sides of mask middle line (M) of reticle are arranged middle line modules alternating in Z and Y direction. In the region of mask middle line the middle line modules extend in Y-direction over the entire width (5) of the scanner slit. The middle line modules of different orientation are point-symmetrically arranged w.r.t. reticle Center point (Z). Independent claims are included for method of proximity characterizing of scanner lenses. |
