发明名称 |
Semiconductor manufacturing/testing ceramic heater, production method for the ceramic heater and production system for the ceramic heater |
摘要 |
An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device wherein resistance heating elements which do not cause a short circuit and the like, are relatively inexpensive and have a precise pattern can be formed. The present invention is a ceramic heater for a semiconductor-producing/examining device comprising a ceramic substrate and a resistance heating element formed on the ceramic substrate, wherein trimming is performed on said resistance heating element.
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申请公布号 |
US2002179592(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20020070443 |
申请日期 |
2002.06.24 |
申请人 |
HIRAMATSU YASUJI;ITO YASUTAKA;KARIYA SATORU |
发明人 |
HIRAMATSU YASUJI;ITO YASUTAKA;KARIYA SATORU |
分类号 |
H01L21/00;H01L21/683;(IPC1-7):H05B3/68 |
主分类号 |
H01L21/00 |
代理机构 |
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地址 |
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