发明名称
摘要 The invention concerns the field of treatments, by energy intake, of thin deposited layers of hydrogenated amorphous silicon to modify a selected physico-chemical property of the layers. The invention is characterised in that it consists in illuminating the layers with a light source emitting a radiation of wavelength included in an optical absorption band of the amorphous silicon, and capable of delivering at least a treating pulse, lasting between 50 ns and 500 ns, thereby enabling the raise the electronic mobility ( mu ) of the thin layer by a factor ranging between 1.5 and 10.
申请公布号 JP2002541679(A) 申请公布日期 2002.12.03
申请号 JP20000611312 申请日期 2000.04.05
申请人 发明人
分类号 G02F1/1368;G02F1/136;G09F9/00;G09F9/30;G09F9/35;H01L21/20;H01L21/268;H01L21/322;H01L21/336;H01L29/423;H01L29/43;H01L29/49;H01L29/786;(IPC1-7):H01L21/20 主分类号 G02F1/1368
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