METHOD FOR MANUFACTURING SAMPLE FOR OBSERVING CRYSTAL DEFECT IN SILICON CRYSTAL AND THIN PIECE SAMPLE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a sample which can form at once a large quantity of thin piece samples for a crystal defect observing transmission electron microscope in the silicon crystal and which can be simply manufactured in a wide area and to provide the thin piece sample. SOLUTION: The method for manufacturing the sample to observe the defect in the silicon crystal by the transmission electron microscope comprises the steps of releasing only a shallow region on the surface of the crystal, and thinning the region to the thin piece samples.