DEFLECTION SYSTEM FOR A PARTICLE BEAM DEVICE

摘要

A particle beam device and a device for energy-correcting deflection of a particle beam at a predetermined deflection angle, said particle beam being incident along a beam axis, wherein the particle beam consists of charged particles with energy scattered at a predetermined energy value. The device has a corrector, wherein said corrector performs direction changes of the charged particles depending on their energy by means of a first electrical field and a first superimposed magnetic field and wherein the direction of the charged particles is maintained with the predetermined energy value as they pass through the corrector. The device also has a deflector connected downstream of the corrector, wherein said deflector deflects the charged particles having the predetermined energy value away from the beam axis at a given deflection angle by means of a second electrical field or a second magnetic field, wherein the deflector focuses the charged particles. The device further has a control device for controlling the corrector and the deflector.