| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute object inspection device which can pick up the images of minute objects while stabilizing the attitude of the minute objects and can further raise the inspection accuracy at high speed while using a single rotary table. SOLUTION: A rotary table 2 is disposed facing a feeder 1. A groove 1a which stabilizes the attitude of the minute objects (workpieces W) is formed in the transporting route of a feeder 1. Moreover, a pocket 2A of the rotary table 2 is formed in a V-shape. Suction and exhaust ports for air intake and exhaust connected to a suction and exhaust apparatus 2P are provided on both surfaces of the V-shaped pocket, suction and exhaust are suitably changed over by a valve to stabilize the attitude of the workpiece W, and the image of the workpiece W is picked up with imaging means (cameras 6A to 6F).
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