NICKEL-TITANIUM SPUTTER TARGET ALLOY

摘要

The sputter target deposits nickel from a binary alloy. The binary alloy contains, by weight percent, 9 to 15 titanium and the balance nickel and incidental impurities. The binary alloy has, by weight percent, 35 to 50 TiNi3 needle-like intermetallic phase and balance alpha-nickel phase. The TiNi3 needle-like intermetallic phase and alpha-nickel phase are formed from a eutectic decomposition. The alpha-nickel phase having a grain size between 50 and 180 mum. The binary alloy has a Curie temperature of less than or equal to a temperature of 25° C. and exhibits paramagnetic properties at temperatures of 25° C. or lower.