Cathode arc source with target feeding apparatus,申请号GB20000010053-传众专利搜索

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发明名称	Cathode arc source with target feeding apparatus
摘要
申请公布号	GB2347146(B)	申请公布日期	2002.10.30
申请号	GB20000010053	申请日期	1998.10.26
申请人	* FILPLAS VACUUM TECHNOLOGY PTE LIMITED;* FILPLAS VACUUM TECHNOLOGY PTE LTD.	发明人	XU * SHI;HONG SIANG * TAN;BENG KANG * TAY
分类号	C23C14/24;H01J37/32;(IPC1-7):H01J37/32	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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