| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar ceramic heater and a method of manufacturing the planar ceramic heater with excellent durability, always securing stable heat generation and heat radiation by stably ensuring electric power supply to a resistance heating element by an electric power supply terminal. SOLUTION: This planar ceramic heater has a planar ceramic base material 3 one main face of which forms a radiating-heating face; the resistance heating element 4 arranged being embedded in the ceramic base material 3; and the electric power supply terminal 1 made of tungsten or molybdenum, with one end connected to the resistance heating element 4 and with the other end side led out to the other main face side of the ceramic base material 3. At least the outer peripheral surface, exposed to a high temperature atmosphere, of the electric power supply terminal 1 is fittingly covered with a sintered aluminum nitride sleeve 1b.
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