摘要 |
PROBLEM TO BE SOLVED: To produce lightweight alkali-free glass which satisfies characteristics required for a glass substrate for TFT(thin film transistor)-LCD(liquid crystal display), has little deflection, and has a thermal expansion coefficient of 25 to 36×10-7/ deg.C, and is therefore suitable for a glass substrate for P-Si.TFT-LCD. SOLUTION: The alkali-free glass has a composition containing, by mass, 58 to 70% SiO2 , 10 to 19% Al2 O3 , 6.5 to 15% B2 O3 , 0 to 2% MgO, 3 to 12% CaO, 0.1 to 5% BaO, 0 to 4% SrO, 0.1 to 6% BaO+SrO, 0 to 5% ZnO, 5 to 15% MgO+CaO+BaO+SrO+ZnO, 0 to 5% ZrO2 , 0 to 5% TiO2 and 0 to 5% P2 O5 , and does not substantially contain alkali metal oxides. the alkali-free glass has a density of <=2.45 g/cm3, a mean thermal expansion coefficient of 25 to 36×10-7/ deg.C in the temperature range of 30 to 380 deg.C, and a strain point of >=640 deg.C.
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