APPARATUS FOR LIFTING AND FALLING HEATER BLOCK OF CHEMICAL VAPOR DEPOSITION EQUIPMENT

摘要

PURPOSE: A heater block lifting and falling apparatus of a CVD(Chemical Vapor Deposition) equipment is provided to prevent abrupt lifting of the heater block by forming a stopper at the lower portion of the heater block. CONSTITUTION: A heater block(23) is formed in a processing chamber(21) for loading a wafer(W). A shower head(25) is located on the processing chamber(21) for spraying processing gases into the wafer(W). A driving unit(30) for lifting and falling the heater block(23) includes a motor(33), a lead screw(35) and a lead screw fixing plate(37). A stopper(39) is formed on the lead screw(35) for restraining abrupt lifting of the heater block(23), thereby preventing a breakage of the heater block(23) and the shower head(25).