| 摘要 |
A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a rigid member, and a mirror. The rigid member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the rigid member. The mirror is attached to the rigid member so that it can move therewith. The rigid member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the rigid member.
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