Laser irradiation apparatus

摘要

[Summary][Object]An object is to obtain an even energy distribution of a laser beam in one direction, thereby conducting a uniform laser annealing on a film. [Solving Means]A laser irradiation apparatus comprising: a lens for dividing a laser beam in one direction; and an optical system for overlapping the divided laser beam, characterized in that the shape of the laser beam entering into the lens has edges vertical to the above-mentioned direction.