发明名称 Linear drive system using inch-worm principle e.g. for setting mechanism in optical system has movable sections of inch-worm clamped relative to guide element in inactive state
摘要 The drive system has an inch-worm (1) with 2 sections (4) coupled via a pneumatically- or piezoelectrically-operated variable length element (6), for displacement relative to a guide element (2) provided by a tubular housing, for linear movement of a component outside the guide element supported by a fixing element (3) attached to one section (4) of the inch-worm. Each section of the inch-worm has at least one clamping device (5), for fixing it in position relative to the guide element in the inactive state.
申请公布号 DE10118456(A1) 申请公布日期 2002.10.17
申请号 DE20011018456 申请日期 2001.04.12
申请人 CARL ZEISS 发明人 HOLDERER, HUBERT
分类号 F15B11/12;F15B15/10;H01L41/09;(IPC1-7):H02N2/02 主分类号 F15B11/12
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