| 摘要 |
A reduced pressure source withdraws gases from a pressure chamber. A supply hopper (13) supplies material to a porous gas distributor (5) within the chamber. A gas source supplies gas to the material in the distributor. A heater (23) adjacent to the distributor, heats the material during gas passage. The treated material is discharged through discharge port (25). Independent claims are included for the following: (1) Ultra pure material production method; and (2) Single or polycrystalline material. |
