| 摘要 |
Disclosed is a plasma display panel, fabricating apparatus and method thereof enabling to reduce a process time for a PDP fabrication as well as prevent a degradation of a panel channel characteristic and panel damage. The present invention, which is carried out in a fabricating apparatus including first to third equipments built airtight in one body so as to carry out a passivation layer forming to an electric discharge gas injection/bonding therein, includes a passivation layer forming step of forming a MgO passivation layer on a first substrate in the first equipment, a cleaning step of transporting the first substrate having the MgO passivation layer and a second substrate to the second equipment, removing impurities existing on the first and second substrates by generating a plasma electric discharge between the first and second substrates using an electric discharge gas in the second equipment, and carrying out vacuum exhaust, and a bonding step of transporting the cleaned first and second substrates to the third equipment, coating a UV-hardening sealant on the first substrate, filing the third equipment with the electric discharge gas, attaching the first substrate closely to the second substrate, irradiating UV-rays on the sealant to be hardened so as to bond the first and second substrates to each other.
|
