Method of manufacturing nozzle plate for ink jet recording head, ink jet recording head comprising such nozzle plate, and ink jet recording apparatus comprising such head

摘要

The method of the present invention of manufacturing a nozzle plate for an ink jet recording head comprises a first step of forming a layer of a resin comprising a benzene ring on a metal substrate, a second step of patterning the layer of the resin by means of excimer laser and partially exposing the metal substrate, a third step of forming a metal layer having a thickness smaller than that of the resin layer on the exposed surface of the metal substrate by electroforming, and a fourth step of separating the metal layer from the metal substrate and the resin layer.