METHOD AND APPARATUS FOR RECOVERING DEPOSITED FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for recovering a deposited film of a metal or a metal compound which can recycle economically from a film making jig, reduce the weight loss of the jig by grinding and the amount of generated waste, and an apparatus for the method. SOLUTION: A cleaning gun 51 which generates a water jet of 30-200 MPa water pressure ejected to the film on the jig mounted on a table 26 in a working room 22 is installed. A ventilating fan 62 for setting a negative pressure in the room 22 is provided. The room 22 can be closed to control the scattering of water by the water jet outside the room 22.