A spiral line with an interval (d) approximately N times (N is a natural number) the wavelength lambda g of an electromagnetic field in a radial antenna (30) has slots (36) of the radial antenna (30) for feeding the electromagnetic field into a processing container. An electromagnetic field is fed from the central section of this radial antenna (30) at a rotation mode.
申请公布号
WO02078072(A1)
申请公布日期
2002.10.03
申请号
WO2002JP02627
申请日期
2002.03.19
申请人
TOKYO ELECTRON LIMITED;ISHII, NOBUO;ANDO, MAKOTO;TAKAHASHI, MASAHARU;YASAKA, YASUYOSHI