| 摘要 |
<p>A laser machining apparatus for machining a work by irradiating a plurality of portions of a deflection area (7) with a laser beam (2) deflected through deflection mirrors (5a, 5b) using a scanning lens (6) for focusing the laser beam (2) on the work wherein the energy of the laser beam can be measured by providing means (11) for measuring the energy of the laser beam projected onto a plurality of different portions (P1-P9) of the deflection area (7). As a result of measurements, partial energy loss in a position A irradiated with the laser beam due to contamination of the scanning lens (6) can be known. When proper maintenance is performed based on that information, machining can be carried out stably over a long term without causing any defective machining.</p> |
