发明名称 Semiconductor device - with basic oxide stabilising layer on upper surface
摘要 The diode, transistor or integrated circuit is covered with a layer of oxide of Gp. I or Gp. II, Bi, Th or rare earth metal. Layers of SiO2 or Si3N4 are opt. added. The substrate, Ge, Si, a 3a-5b or 2a-4b alloy is coated by spluttering or vacuum deposition of the metal under vacuum and this is oxidised in situ.
申请公布号 DE1920344(A1) 申请公布日期 1971.02.25
申请号 DE19691920344 申请日期 1969.04.22
申请人 LICENTIA PATENT-VERWALTUNGS-GMBH 发明人 BATZ,MONIKA
分类号 H01L21/28;H01L21/314;H01L21/316;H01L21/473;H01L23/29;H01L23/31;H01L29/00 主分类号 H01L21/28
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