| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a semiconductor integrated circuit and a testing method thereof which allow the working load or the waiting time for inspector for the lot change and the number of cassettes to be reduced to improve the availability of a tester in the probe inspection of a wafer test process, especially, to make well adaptable to various types of products per prober unit. SOLUTION: A probe inspection system builds up a network of probers, testers, production specification management, test step control, test result management, etc., to improve the software of the prober. Lots A, B, C are set in cassettes (1), (2) one after another, and, if a lot is set in one cassette after the other cassette reaches the lot end, an operation of automatically executing the next lot process is repeated to enable the continuous working of the lot. Even during processing of the next lot, the lot change in a process-completed cassette and data input of the lot number, etc., are always allowed.
|
