发明名称 METHOD OF ACTUATING MEMS SWITCHES
摘要 <p>A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.</p>
申请公布号 WO2002075427(A1) 申请公布日期 2002.09.26
申请号 US2001008431 申请日期 2001.03.16
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