| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist composition excellent in storage stability. SOLUTION: In a method for preparing the resist composition in which a resist solution obtained by dissolving an alkali-soluble resin and a quinonediazido-containing compound in an organic solvent is filtered and filled into a container, temperature control is carried out so that the solution is kept at <50 deg.C until it is filled into the container and the temperature of the solution is made 35 to <50 deg.C when the components are dissolved. |
