| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring device capable of measuring easily the three-dimensional shape even in the case of a measuring object having large irregularities. SOLUTION: A lattice pattern P' comprising mutually-parallel plural straight line patterns is projected on a work 6, and the work 6 is moved in the x- direction by a moving device 7 and simultaneously imaged by a line sensor 4. In this case, the pattern of an intersection part between an imaging region 10 and the pattern P' is also imaged by the line sensor 4. The imaged image of the pattern is photographed on the image of the work 6 as a striped pattern. A strain of the striped pattern is calculated by an operation part 111, to thereby measure the surface shape of the work 6. In addition, the angleθof the projected lattice pattern P' is changed by changing the angle of a lattice pattern P by an angle changing mechanism 12, to thereby change resolution of height measurement.
|
