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发明名称
Fluid-Anschlußeinrichtung für eine im Ultrahochvakuum sich drehende Vorrichtung
摘要
申请公布号
DE4337881(C2)
申请公布日期
2002.08.29
申请号
DE19934337881
申请日期
1993.11.05
申请人
MDC VACUUM PRODUCTS CORP., HAYWARD
发明人
TSUJIMOTO, NICK;WEISS, MICHAEL
分类号
H01J37/02;H01J37/305;(IPC1-7):H01J37/305;C23C14/30
主分类号
H01J37/02
代理机构
代理人
主权项
地址
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