发明名称 Method and apparatus for inhibiting infiltration of a reactive gas into porous refractory insulation
摘要 The invention is relates to CVI/CVD furnace apparatus. More specifically, the invention is directed to methods and apparatus for inhibiting infiltration of reactive gas into insulation for a high temperature CVI/CVD furnace. A method and apparatus is provided that inhibits infiltration of reactant gas into porous insulation over extended periods of time, preferably the life of the furnace.
申请公布号 US6440220(B1) 申请公布日期 2002.08.27
申请号 US19980177990 申请日期 1998.10.23
申请人 GOODRICH CORPORATION 发明人 RUDOLPH JAMES WARREN
分类号 C23C16/04;C23C16/44;F27D1/00;(IPC1-7):C23C8/06 主分类号 C23C16/04
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