X-RAY DETECTOR AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high-sensitive X-ray detector capable of suppressing movement of a secondary electron image and distortion of the secondary electron image caused by astigmatism or the like even if bringing the detector close to a sample inside an electron microscope. SOLUTION: This X-ray detector is provided with a magnetic field generation means for counterbalancing a stray magnetic field to a sample base from a magnetic generation means provided for blocking incidence of electrons generated together with X-rays by sample irradiation into a detection element inside the X-ray detector.