HEATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To enhance the efficiency of application of heat to an evaporation container by means of a heating apparatus. SOLUTION: The heating apparatus 10 has a heater 20 built into a housing 11, and the heater 20 is composed of an electrode terminal 21, a heater element 22 and a radiating terminal 23. The electrode terminal 21 is seated on the housing 11 by a leg part 21B made of a spring.