发明名称 |
Serial wafer handling mechanism |
摘要 |
A wafer handling system for a wafer processing apparatus includes a wafer load lock chamber, a wafer processing chamber and a transfer chamber operatively coupled to the wafer load lock chamber and the wafer processing chamber. The transfer chamber includes a wafer transfer mechanism comprising a transfer arm pivotably coupled to a portion of the transfer chamber which forms an axis. The transfer arm is operable to rotate about the axis to transfer a wafer between the wafer load lock chamber and the process chamber in a single axis wafer movement. The invention also includes a method of transferring a wafer to a wafer processing apparatus. The method includes loading a wafer into a wafer load lock chamber and rotating a transfer arm into the wafer load lock chamber to retrieve the wafer therein. The method further includes rotating the transfer arm out of the wafer load lock chamber and into a process chamber to deposit the wafer therein, wherein the rotating of the transfer arm occurs in a single axis wafer movement.
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申请公布号 |
US6429139(B1) |
申请公布日期 |
2002.08.06 |
申请号 |
US19990466628 |
申请日期 |
1999.12.17 |
申请人 |
EATON CORPORATION |
发明人 |
RYAN KEVIN THOMAS;KELLERMAN PETER LAWRENCE;SINCLAIR FRANK;ALLEN ERNEST EVERETT;FISH ROGER BRADFORD |
分类号 |
B65G49/07;C23C14/50;C23C16/44;H01L21/677;H01L21/68;H01L21/687;(IPC1-7):H01L21/302 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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