发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that reduces the difference in plating deposition rate between a central region and a outer region of a wafer to be reduced, and to provide a manufacturing method for the semiconductor device. SOLUTION: A plurality of chip element forming regions and a scribe line region separating the plurality of the chip elements forming regions from one another are formed on a wafer 10. A wiring 1 is formed in the scribe line region, so as to surround each of the chip element forming regions and to extend to close-to-edge regions P of the wafer.
申请公布号 JP2002217196(A) 申请公布日期 2002.08.02
申请号 JP20010008725 申请日期 2001.01.17
申请人 MITSUBISHI ELECTRIC CORP 发明人 TOYODA YOSHIHIKO
分类号 H01L21/288;H01L21/3205;H01L21/768;H01L21/78;H01L23/52;H01L23/544;H01L29/06;(IPC1-7):H01L21/320 主分类号 H01L21/288
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