INTEGRATED MIRROR ARRAY AND CIRCUIT DEVICE WITH IMPROVED ELECTRODE CONFIGURATION

摘要

An integrated circuit and mirror device(400)and method.The devicehas a first substrate (401)comprising a plurali ty of electrode groups, which comprise a plurality of e lectrodes(417),(406). The device also has a mirror array formed on a second substrate (419).Each of the mirrors on the array has a mirror surface bein g able to pivot about a point in space. Each of the mirrors has 10 a backside surface operably coupled to one of the electrode groups. The device has a capacitance spacer layer disposed between each of the electrode groups and its respective mirror. The mirror is one from the mirror array. A drive circuitry (805)is coupled to each electrode groups. The drive circuitry is configured to apply a drive voltage to any one of the electrodes in each of the electrode groups. The drive circuitry (805) is also disposed in the first substrate and is adapted to pivot each of the mirror faces about the point in space.