POLYLACTIDE COMPOUND AS SENSITIZER FOR PHOTOSENSITIVE MIXTURE FOR RADIATION

摘要

PURPOSE: To provide a photoresist composition using a polylactide compound as a sensitizer. CONSTITUTION: The radiation sensitive composition is a mixture of at least one kind of an alkali soluble binder resin, at least one kind of a photoactive compound and a certain quantity of at least one kind of the polylactide compound to increase effective sensitivity in a solvent and the quantity of the binder resin is 60-95wt.%, basing on the total solid content of the radiation sensitive composition and the quantity of the photoactive component is 5-40wt.%.