发明名称 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
摘要 |
An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.
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申请公布号 |
US2002096632(A1) |
申请公布日期 |
2002.07.25 |
申请号 |
US20010988339 |
申请日期 |
2001.11.19 |
申请人 |
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发明人 |
KAJI KAZUTOSHI;AOYAMA TAKASHI;TAYA SHUNROKU;ISAKOZAWA SHIGETO |
分类号 |
G01Q30/02;G01Q30/06;H01J37/252;(IPC1-7):H01J49/44;H01J37/256;G01N23/08 |
主分类号 |
G01Q30/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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