| 摘要 |
PURPOSE: To prevent the oxidization of copper, printed as a wiring, upon heating a print substrate made of ceramic. CONSTITUTION: A hot plate 4 is constituted of a plurality of divided bodies 4a, 4b, 4c and a plurality of passages 8 are bored horizontally on the divided body 4a while vertical passages 9 are bored on the divided bodies 4b, 4c and the upper ands of the passages 9 are communicating with the passages 8. Further, inert gas supplying pipes 10 are inserted into the passages 9 from the lower part thereof and inert gas injection ports, connected to the passage 8, are opened on the upper surface of the hot plate 4. |
