MICROMECHANICAL COMPONENT COMPRISING AN OSCILLATING BODY,申请号EP19980965838-传众专利搜索

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发明名称	MICROMECHANICAL COMPONENT COMPRISING AN OSCILLATING BODY
摘要
申请公布号	EP1123526(B1)	申请公布日期	2002.07.24
申请号	EP19980965838	申请日期	1998.12.15
申请人	FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	SCHENK, HARALD;DUERR, PETER;KUECK, HEINZ
分类号	G02B26/08;(IPC1-7):G02B26/08	主分类号	G02B26/08
代理机构		代理人
主权项
地址

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