发明名称 Methods of forming patterned constructions, methods of patterning semiconductive substrates, and methods of forming field emission displays
摘要 In one aspect, the invention includes a method of patterning a substrate. A film is formed over a substrate and comprises a plurality of individual molecules. The individual molecules comprise two ends with one of the two ends being directed toward the substrate and the other of the two ends being directed away from the substrate. Particle-adhering groups are bound to said other of the two ends of at least some of the individual molecules and a plurality of particles are adhered to the particle-adhering groups to form a mask over the substrate. The substrate is etched while the mask protects portions of the substrate. In another aspect, the invention encompasses a method of forming a field emission display. A material having a surface of exposed nitrogen-containing groups is formed over the substrate. At least one portion of the material is exposed to radiation while at least one other portion of the material is not exposed. The exposing renders one of the exposed or unexposed portions better at bonding the masking particles than the other of the exposed and unexposed portions. After the exposing, the material is bonded with masking particles. The adhered masking particles define a mask over the semiconductive substrate. The substrate is etched while the patterned mask protects portions of the substrate. A plurality of emitters are formed from the substrate. A display screen is provided to be spaced from the emitters.
申请公布号 US6420086(B1) 申请公布日期 2002.07.16
申请号 US20010765211 申请日期 2001.01.16
申请人 MICRON TECHNOLOGY, INC. 发明人 YANG JIANPING P.;WELLS DAVID H.;KNAPPENBERGER ERIC J.
分类号 H01J9/02;H01L21/027;(IPC1-7):G03C1/76 主分类号 H01J9/02
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