| 摘要 |
<p>A method of separating ion mass, comprising the steps of, by using an air-cored exciting current path (21) formed by spirally winding a conductor (20) in lateral direction on the outside of a bent ion deflection casing having an inlet and an outlet along a bent shape after passing through the inlet and outlet, forming a magnetic field of uniform intensity laterally in the ion deflection casing, leading an ion beam into the air-cored exciting current path through a clearance between the conductors (20c) at the inlet, bending the ion beam according to ion mass by the action of a magnetic field caused by the air-cored exciting current path, and taking out the ion beam of a desired mass through a clearance between the conductors (20d) at the outlet, whereby the ion mass can be separated uniformly from the large diameter ion beam.</p> |
