| 摘要 |
PROBLEM TO BE SOLVED: To manufacture highly precise and reproducible surface three- dimensional structure at low cost by simplifying the process of the manufacture. SOLUTION: The surface of a metal mold 2a is released, ultraviolet ray hardening type resin 6 is coated thereon, and a target product material 8 treated by silane coupling is slowly pushed thereon. The uniform ultraviolet ray is irradiated from the rear side of the target product material substrate 8 so as to harden the ultraviolet ray hardening type resin layer 6. The metal mold 2a is exfoliated with the ultraviolet ray hardening type resin layer 6 joined with the target product martial substrate 8. The transfer shape of the resin layer 6a on the target product material substrate 8 is transferred to the target product material substrate 8 by a dry etching method.
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