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发明名称
METHOD FOR DETERMINING THE ENDPOINT OF ETCH PROCESS STEPS
摘要
申请公布号
EP1218934(A1)
申请公布日期
2002.07.03
申请号
EP20000964248
申请日期
2000.09.28
申请人
INFINEON TECHNOLOGIES SC300 GMBH & CO. KG;INFINEON TECHNOLOGIES AG;MOTOROLA, INC.
发明人
PETRUCCI, JOSEPH, LOUIS;MORGENSTERN, THOMAS
分类号
H01L21/302;H01J37/32;H01L21/3065;H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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