发明名称 |
METHOD AND APPARATUS FOR RADIATION-ASSISTED ELECTROCHEMICAL ETCHING, AND ETCHED PRODUCT |
摘要 |
<p>An electrochemical etching system (10) has an etching bath (12) for holding an n-type silicon substrate (20) with one surface (32) of the substrate being in contact with hydrofluoricacid (14), an electrode (28) positioned in hydrofluoricacid, a power source (30) having a positive polarity connected to the silicon substrate and a negative polarity connected to the electrode, and an illumination unit (52) having a light source (56) for an illumination of the other surface (38) of the silicon substrate. The illumination unit illuminates the other surface of the silicon substrate with an illumination of 10mW/cm<2> or more. Also, a ratio of a maximum illumination to a minimum illumination to the other surface of the silicon substrate is set 1.69:1 or less. With the etching system, pores and/or trenches of a certain size and shape can be formed in an entire area of the silicon substrate with a diameter of more than three inches. <IMAGE></p> |
申请公布号 |
EP1220307(A1) |
申请公布日期 |
2002.07.03 |
申请号 |
EP20000929846 |
申请日期 |
2000.05.24 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
IZUO, SHINICHI;OHJI, HIROSHI;TSUTSUMI, KAZUHIKO;FRENCH, PATRICK, JAMES |
分类号 |
C25F3/12;H01L21/3063;(IPC1-7):H01L21/306 |
主分类号 |
C25F3/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|