| 摘要 |
PROBLEM TO BE SOLVED: To provide a diffraction grating pattern in which a smooth profile line regulating the outline of the pattern can be formed approximately to the objective profile line without significantly increasing the manufacturing time and work and which shows no decrease in the chroma. SOLUTION: The grating lines are formed in the outline having a desired and smooth profile by regulating the outline of the grating lines by a cell structure having a smaller side line than the line width of the grating line.
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